ThermoChuck®
Systems
Thermal Chucks for Semiconductor Wafer Testing
Conductive heating and cooling systems for semiconductor wafer testing in probing stations. -65°C to +300°C range, 150 / 200 / 300mm wafers, high voltage up to 10kV.
Key Features
Thermal Wafer Probing
Conductive heating and cooling system for wafer testing in probing stations. Electrical qualification of entire wafers at controlled temperature.
Range -65°C to +300°C
The widest range in the Temptronic family — covers cryogenic to high-temperature tests for power semiconductors.
High Voltage up to 10kV
High voltage probing support up to 10kV — ideal for GaN, SiC power components and dielectric insulation tests on wafer.
Low Leakage Probing (fA)
Femtoampere (fA) level leakage current probing — for ultra-precise measurements on very high impedance components and MEMS devices.
150mm, 200mm & 300mm Wafers
Available for all standard semiconductor wafer sizes. Systems often custom-configured for specific probing stations.
Retrofit for Existing Stations
Available in retrofit version — preserving your equipment investment.
Available Models
Delivery in Morocco, North Africa & Middle East
| Model | Thermal Range | Cooling | Heating |
|---|---|---|---|
| TP03000A | -65 à +200°C | Mechanical refrigeration, closed-loop liquid | Thermoelectric |
| TP03010A | +20 à +200°C | Open loop — air or water* | Thermoelectric |
| TP03010B | 0 à +200°C | Closed-loop glycol/water | Thermoelectric |
| TP03015A | +30 à +200°C (+300°C opt) | Open loop — air or water* | Resistive |
| TP03015B | +30 à +200°C (+300°C opt) | Closed-loop glycol/water | Resistive |
| Model | Thermal Range | Cooling | Heating |
|---|---|---|---|
| TP03500A | -55 à +200°C | Mechanical refrigeration, closed-loop liquid | Resistive |
| TP03500D | +20 à +200°C (+300°C opt) | Air with vortex (open loop)* | Resistive |
| TP03500E | +30 à +200°C (+300°C opt) | Air (open loop) | Resistive |
* Cooling fluid is user-supplied.
Applications
Wafer Probing
Full semiconductor wafer electrical testing at controlled temperature
Wafer Burn-in
Accelerated aging of wafers at high temperature
Laser Trim
Laser adjusting of resistors at precisely controlled temperature
Power Devices (GaN/SiC)
High voltage (10kV) testing of power semiconductor components
Finish Options
Gold Plating
Gold surface for very low current measurements (fA)
Nickel Plating
Nickel surface for standard probing and burn-in applications
Custom Configuration
ThermoChuck® systems are often highly configured to adapt to specific probing stations. FCE works directly with you to define the optimal configuration.
Discuss your configurationFCE — Freshen Cool Énergie is the accredited distributor of Temptronic (InTest Thermal Solutions) for Morocco, North Africa, the Middle East, and Southern Europe. We provide delivery, installation, training, and maintenance for all equipment throughout the region.
Want to customize this product?
Describe your specific requirements. Our FCE engineers will propose a configuration tailored to your application within 24h.